automatic foup/fosb cleaning system
xtrim-fc-a300
equipment overview
loadport*3、clean chamber*3 、vacuum chamber*3、 robot
fully automated process
fully automated process, including lid opening/closing, wafer inspection, cleaning, drying, vacuuming, and dehumidification
high compatibility
supports various foup/fosb types without hardware modifications
superior process performance
particle、amc（including voc）、outgassing controlling
n2 purge maintains optimal humidity inside the foup
high throughput
capable of cleaning 25-30 foup/ fosb per hour
semi s2 f47 certificated