horizontal foup cleaner
xtrim-fc-h300
equipment overview
5 systems：pure water heating high-pressure spray high-speed centrifugal dewatering cda/n2 purging hot air/infrared drying
cleaning chamber equipped with 4/6 foup inserts (customizable as required)
high cleaning efficiency
complete a cleaning cycle within 30-60 minutes, ensuring products enter and exist in a dry state
superior process performance
provides excellent particle control
hot air/infrared drying
compatibility
supports foup for wafers from 4” to 12”
supports foup, fosb, mask package, cassette, box, etc
enhanced safety
dbps dynamic balance protection
foolproof protection system
high temperature interlock control
semi s2 f47 certificated