automatic single wafer cleaner
xtrim-sc-cl300
equipment overview
loadport*4、multi chambers、robot、cdu、e-flow
comprehensive functions
optional basic configurations: nano-spray、brush clean、mega-sonic、diw、n2
compatible with corresponding chemicals based on your needs
chemical savings
supports chemical recycling
compatible with various chemicals
allows recipe switching based on wafer quantity and processing time
standard modules
consists of standardized modules, and jsxm has extensive assembly experience
compact equipment structure saves space
automation
automated robot loading and unloading and mapping
enables continuous automated process handling