automatic stripper
xtrim-sc-st300
equipment overview
load port *4、multi chambers、robot、cdu、e-flow
complete function
basic configurations such as nano-spray, mega-sonic, heating, n2 bubbling, and atmospheric/high-pressure diw (deionized water) are optional
corresponding chemical solutions can be matched according to customers' needs, such as nmp (n-methyl-2-pyrrolidone), naoh (sodium hydroxide), ipa (isopropyl alcohol), etc.
chemical savings
equipped with professional systems for chemical solution recycling, automatic liquid replenishment, temperature control of the chemical solution, as well as air exhaust and waste discharge
supports switching recipes by the number of wafers or time, which can fully extend the service life of the chemical solutions
pollution control
professional materials are selected to achieve efficient control of particles
the enclosed wafer processing environment effectively prevents the atomization of chemical liquids and particulate contamination
customizable
supports 6-inch, 8-inch, and 12-inch wafers
customized configurations can be made according to customers' requirements