automatic wet bench equipment---cstless
xtrim-bc-l300
xtrim-bc-l200
xtrim-bc-l150
equipment overview
load/unload、chemical baths (spm、hf、sc1、sc2、boe、h3po4…) 、 qdr 、marangoni dryer，robot、transfer… support tools: cds、lcds
customizable
8”smif lp
12” foup lp
suitable for all kinds of potions
process tank can be customized according to demand
precise contro
professional flow field, temperature control design
precise liquid distribution: select flowmeter/ metering pump/metering barrel/concentration meter according to the process
precise rehydration: by number of tablets/time/concentration.
particle control
cst-less mode
professional material selection
gas flow field control system •advanced drying system.
cleanness
equipped with heating, cycling, megasound cleaning and concentration online monitoring technology, enhance the wafer cleaning effect
equipped with marangoni dryer to ensure wafer drying and safe production.