automatic wet bench equipment ---cassette type
xtrim-bc-a300
xtrim-bc-a200
xtrim-bc-a150
equipment overview
load/unload、chemical baths（spm、hf、sc1、sc2 、boe、h3po4 、ekc、nmp…)、qdr 、 ir dryer、marangoni dryer 、 robot、transfer…
support tools: cds、lcds
customizable
adaptable to various chemical solutions
customizable tanks
high throughput
supports mass production with 25/50 wafers
multiple robots operate collaboratively
compatibility
supports wafers from 8”to 12”
can be applied to substrate manufacturing, integrated circuits and advanced packaging
flexibility
supports open cassette、smif、foup to load/unload
modular design meets diverse process requirements